Ku-band Reconfigurable MEMS Antenna on Silicon substrate
نویسندگان
چکیده
This article presents design and fabrication methodology of Ku Band (linearly polarized) reconfigurable patch antenna. Both bulk and surface micromaching techniques are implemented on patch to have better RF performances. Reconfigurability is implemented by integrating shunt capacitive switch with microstrip patch antenna. Effect of feed mechanisms and role of micromachining on antenna parameters have been detailed here. Simulation was carried out for 675 μm high resistive Si-substrate with commercially available FEM based EM solver. A frequency drift of 200 MHz is achieved at Ku-band for the designed antenna. Index Terms —Reconfigurable Antenna, Inset feed, quarterwave matching, micromachining.
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